@article {1183, title = {Direct Deposition of Crystalline Ta3N5 Thin Films on FTO for PEC Water Splitting}, journal = {ACS Applied Materials \& Interfaces}, volume = {11}, year = {2019}, pages = {15457-15466}, keywords = {ALD, CVD, FTO, PEC, Photoanode, Ta3N5, Tantalum nitride}, doi = {10.1021/acsami.8b21194}, url = {https://doi.org/10.1021/acsami.8b21194}, author = {Hajibabaei, Hamed and Little, Daniel J. and Pandey, Ayush and Wang, Dunwei and Mi, Zetian and Hamann, Thomas W.} }