@article {1183,
	title = {Direct Deposition of Crystalline Ta3N5 Thin Films on FTO for PEC Water Splitting},
	journal = {ACS Applied Materials \& Interfaces},
	volume = {11},
	year = {2019},
	pages = {15457-15466},
	keywords = {ALD, CVD, FTO, PEC, Photoanode, Ta3N5, Tantalum nitride},
	doi = {10.1021/acsami.8b21194},
	url = {https://doi.org/10.1021/acsami.8b21194},
	author = {Hajibabaei, Hamed and Little, Daniel J. and Pandey, Ayush and Wang, Dunwei and Mi, Zetian and Hamann, Thomas W.}
}
